Tisin Kaplamaların Üretilmesi, Mekanik ve Aşınma Özelliklerinin Araştırılması
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Date
2022
Authors
Acar, Yunus Emre
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Abstract
Endüstriyel bir yüzey kaplama yöntemi olarak bilinen fiziksel buhar biriktirme (PVD) yöntemi metalik malzemelerin mekanik ve tribolojik özelliklerinin iyileştirilmesinde tercih edilen bir kaplama tekniğidir. Bu tez kapsamında PVD tekniği ile TiSiN filminin silisyum (Si) miktarı arttırılarak Al2024 ve 52100 çelik taban malzemeler üzerine büyütülen kaplamanın yapısal, mekanik ve tribolojik özellikleri araştırılmıştır. Bu çalışmanın amacı Si miktarı (Si: %10-14-20) değiştirilerek düşük sürtünme katsayısı, yüksek sertlik ve yüksek aşınma direnci elde etmektir. Büyütülen TiSiN ince filmlerin yapısal özellikleri XRD ve SEM, mekanik özellikleri Vickers mikro sertlik ve tribolojik özellikleri ise atmosfer ortamında Pin-on-disc aşınma test analiz cihazlarıyla tespit edilmiştir. XRD analizleri sonucu Si değeri arttıkça pik yoğunluklarında bir miktar azalma ve kristal yapıdan amorf yapıya doğru geçiş gözlemlenmiştir. En düşük sürtünme katsayısı 1 N yük altında Al2024 Si:%10'da 0,52 olarak belirlenmiştir. Ayrıca en yüksek sertlik değeri 52100 çelik üzerine büyütülen TiSiN Si:%20'de 618 HV0,1 ve en yüksek film kalınlığı 2,05 µm olarak Si:%20 ile büyütülen TiSiN filminde tespit edilmiştir. Si miktarının film yapısında artmasıyla mekanik ve tribolojik özelliklerinde belirgin değişiklikler olduğu gözlemlenmiştir.
Physical vapor deposition (PVD) method, known as an industrial surface coating method, is a preferred coating technique for improving the mechanical and tribological properties of metallic materials. Within the scope of this thesis, the structural, mechanical and tribological properties of the coating grown on Al2024 and 52100 steel substrates by increasing the silicon (Si) amount in the TiSiN film with the PVD technique were investigated. The aim of this study was to obtain low friction coefficient, high hardness and high wear resistance by changing Si amount ( Si: %10-14-20). Structural properties of the grown TiSiN thin films were determined by XRD and SEM, mechanical properties were determined by Vickers microhardness and tribological properties were determined by Pin-on-disc wear test devices in atmospheric environment. As the Si value increased as a result of XRD analysis, a slight decrease in peak intensities and a transition from crystalline structure to amorphous structure were observed. The lowest coefficient of friction was determined as 0.52 at Al2024 Si:%10 under 1 N load. In addition, the highest hardness value was determined as 618 HV0,1 in TiSiN Si:%20 grown on 52100 steel, and the highest film thickness was 2.05 µm in TiSiN film grown with Si:%20. It was observed that there were significant changes in the mechanical and tribological properties with the increase of the Si amount in the film structure.
Physical vapor deposition (PVD) method, known as an industrial surface coating method, is a preferred coating technique for improving the mechanical and tribological properties of metallic materials. Within the scope of this thesis, the structural, mechanical and tribological properties of the coating grown on Al2024 and 52100 steel substrates by increasing the silicon (Si) amount in the TiSiN film with the PVD technique were investigated. The aim of this study was to obtain low friction coefficient, high hardness and high wear resistance by changing Si amount ( Si: %10-14-20). Structural properties of the grown TiSiN thin films were determined by XRD and SEM, mechanical properties were determined by Vickers microhardness and tribological properties were determined by Pin-on-disc wear test devices in atmospheric environment. As the Si value increased as a result of XRD analysis, a slight decrease in peak intensities and a transition from crystalline structure to amorphous structure were observed. The lowest coefficient of friction was determined as 0.52 at Al2024 Si:%10 under 1 N load. In addition, the highest hardness value was determined as 618 HV0,1 in TiSiN Si:%20 grown on 52100 steel, and the highest film thickness was 2.05 µm in TiSiN film grown with Si:%20. It was observed that there were significant changes in the mechanical and tribological properties with the increase of the Si amount in the film structure.
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Keywords
Makine Mühendisliği, Aşınma, Fiziksel Buhar Biriktirme, Kaplama, Titanyum Nitrür, Triboloji, Mechanical Engineering, Wear, Physical Vapour Deposition, Coating, Titanium Nitride, Tribology
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60
