Comparison of Structural and Wear Properties of Alsi(n-O) Films

Abstract

The aim of this study was to produce the AlSiN and AlSiO films using sputtering technique and investigate their structural, mechanical and tribological properties comparatively. Coatings were deposited on AISI D2 steel substrates by using 5%, 10% and 15% nitrogen and oxygen gas ratios. The coatings were amorphous when they were first produced, and then heat treatment at 550? was applied to obtain a crystalline structure. In order to determine the structural, mechanical and tribological properties of the films, XRD, SEM, EDS, knoop microhardness test, 3D profilometer and pin-on-disc wear tests were performed respectively. It has been determined that the gas flow rates had a significant effect on the properties of the AlSiN and AlSiO coatings. It has also been determined that all the coatings had a very dense and columnar structure, and that the thickness values varied according to the nitrogen and oxygen gas flow rates. The hardness values of the oxide films were higher than the nitrogen films. The highest hardness value was 595 HK and the lowest friction coefficient was 0.47. In addition, the lowest wear rate was obtained at 10% nitrogen gas flow ratio. It has been observed that the tribiological properties of the oxide films were very close to nitride films.