Influences of Ti, Al and V Metal Doping on the Structural, Mechanical and Tribological Properties of DLC Films

Abstract

DLC films are widely used in different engineering products. However, some problems such as inadequate toughness, insufficient adhesion and internal stresses affect their performance. Therefore, we aimed to enhance the mechanical and tribological features of Cp-Ti by metal-free and metal-doped DLC films in this study. Cp-Ti samples were coated with un-doped and Ti, Al and V metal-doped DLC films by PVD. Their properties were investigated by Raman, XPS, XRD, SEM and wear tester. The results revealed that the incorporation of metal in DLC increased the disorder. Ti, Al and V carbides formed on DLC due to bonding of doping elements with carbon. Metal-doping improved the adhesion and decreased the internal stresses and these improvements caused metaldoped films to exhibit better tribological properties than metal-free film.